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get a shoe if i don’t get the girl send me something real.1. Field of the Invention
The present invention relates to a method for fabricating semiconductor device and more specifically to a method of using different etching rate of an etching process to form fine patterns in a semiconductor device.
2. Description of the Related Art
In order to form a pattern having a width of 0.5 μm or less in a semiconductor device, it is required to develop processes to etch a fine pattern having a fine thickness of 0.5 μm or less, as well as processing techniques to control etching characteristics, such as an etching rate, an etching selectivity and an etching rate uniformity, and to form a fine pattern with excellent electrical characteristics.
However, it is difficult to form a fine pattern with excellent characteristics and a fine pattern with a controlled etching rate when an etching process is directly performed for etching the fine pattern. In order to resolve such problems, it is possible to use an etching process in which etching conditions such as an etching gas, a pressure and a temperature are controlled to manufacture a fine pattern having excellent characteristics.
When a fine pattern is to be manufactured in a semiconductor device, the characteristics of the fine pattern greatly depends on the reliability of the etching process. Therefore, techniques for controlling the etching process may be used to manufacture a fine pattern having a controlled etching rate.
Meanwhile, it is known that a micro pattern may have a great difference in characteristics depending on the etching rate and the etching selectivity in a process of manufacturing a micro pattern. For example, when a fine line pattern is formed by etching a semiconductor substrate, the thickness of the fine line pattern may be varied by the etching rate depending on the etching selectivity of the process.
In addition, it is known that the thickness of a pattern is varied according to the thickness of a
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